JPS61119648A - 焼結複合タ−ゲツト材 - Google Patents

焼結複合タ−ゲツト材

Info

Publication number
JPS61119648A
JPS61119648A JP24183184A JP24183184A JPS61119648A JP S61119648 A JPS61119648 A JP S61119648A JP 24183184 A JP24183184 A JP 24183184A JP 24183184 A JP24183184 A JP 24183184A JP S61119648 A JPS61119648 A JP S61119648A
Authority
JP
Japan
Prior art keywords
target material
powder
rare earth
particles
sintered composite
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP24183184A
Other languages
English (en)
Japanese (ja)
Other versions
JPH036218B2 (en]
Inventor
Kenichi Hijikata
土方　研一
Kazuyuki Sato
一幸 佐藤
Hitoshi Maruyama
仁 丸山
Riyouko Furuhashi
古橋　亮子
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Metal Corp
Original Assignee
Mitsubishi Metal Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Metal Corp filed Critical Mitsubishi Metal Corp
Priority to JP24183184A priority Critical patent/JPS61119648A/ja
Priority to US06/787,529 priority patent/US4620872A/en
Priority to DE19853537191 priority patent/DE3537191A1/de
Publication of JPS61119648A publication Critical patent/JPS61119648A/ja
Publication of JPH036218B2 publication Critical patent/JPH036218B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP24183184A 1984-10-18 1984-11-16 焼結複合タ−ゲツト材 Granted JPS61119648A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP24183184A JPS61119648A (ja) 1984-11-16 1984-11-16 焼結複合タ−ゲツト材
US06/787,529 US4620872A (en) 1984-10-18 1985-10-15 Composite target material and process for producing the same
DE19853537191 DE3537191A1 (de) 1984-10-18 1985-10-18 Verbundtargetmaterial und verfahren zu seiner herstellung

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24183184A JPS61119648A (ja) 1984-11-16 1984-11-16 焼結複合タ−ゲツト材

Publications (2)

Publication Number Publication Date
JPS61119648A true JPS61119648A (ja) 1986-06-06
JPH036218B2 JPH036218B2 (en]) 1991-01-29

Family

ID=17080143

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24183184A Granted JPS61119648A (ja) 1984-10-18 1984-11-16 焼結複合タ−ゲツト材

Country Status (1)

Country Link
JP (1) JPS61119648A (en])

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62256962A (ja) * 1986-04-30 1987-11-09 Mitsubishi Metal Corp 光磁気記録媒体形成用スパツタリングタ−ゲツト材
JPS63274764A (ja) * 1987-04-30 1988-11-11 Sumitomo Metal Mining Co Ltd 光磁気記録用合金タ−ゲツト
JPH01142078A (ja) * 1987-11-27 1989-06-02 Matsushita Electric Ind Co Ltd スパッタリングターゲット
US4957549A (en) * 1987-04-20 1990-09-18 Hitachi Metals, Ltd. Rare earth metal-iron group metal target, alloy powder therefor and method of producing same
US5338331A (en) * 1991-06-12 1994-08-16 Mitsubishi Materials Corporation Low-permeability high-strength target material for the formation of thin magnetooptical recording films

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015070115A (ja) * 2013-09-30 2015-04-13 株式会社Ｓｃｒｅｅｎホールディングス 電子デバイス用構造体、プラズマｃｖｄ装置、および成膜方法

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62256962A (ja) * 1986-04-30 1987-11-09 Mitsubishi Metal Corp 光磁気記録媒体形成用スパツタリングタ−ゲツト材
US4957549A (en) * 1987-04-20 1990-09-18 Hitachi Metals, Ltd. Rare earth metal-iron group metal target, alloy powder therefor and method of producing same
US5062885A (en) * 1987-04-20 1991-11-05 Hitachi Metals, Ltd. Rare earth metal-iron group metal target, alloy powder therefor and method of producing same
US5098649A (en) * 1987-04-20 1992-03-24 Hitachi Metals, Ltd. Rare earth metal-iron group metal target, alloy powder therefor and method of producing same
JPS63274764A (ja) * 1987-04-30 1988-11-11 Sumitomo Metal Mining Co Ltd 光磁気記録用合金タ−ゲツト
JPH01142078A (ja) * 1987-11-27 1989-06-02 Matsushita Electric Ind Co Ltd スパッタリングターゲット
US5338331A (en) * 1991-06-12 1994-08-16 Mitsubishi Materials Corporation Low-permeability high-strength target material for the formation of thin magnetooptical recording films
KR100259319B1 (ko) * 1991-06-12 2000-06-15 아끼모토 유미 박막 자기광학적 기록필름 형성을 위한 고강도, 저투자율의 타겟소재

Also Published As

Publication number Publication date
JPH036218B2 (en]) 1991-01-29

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Legal Events

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